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通过离子束对沉积在玻璃上的多晶金薄膜进行纳米结构溅射

Nanostructuring of polycristalline gold thin films, deposited on glass, by means of ion beam
课程网址: http://videolectures.net/slonano07_setina_batic_npg/  
主讲教师: Barbara Šetina Batič
开课单位: 约瑟夫·斯特凡学院
开课时间: 2008-01-18
课程语种: 英语
中文简介:
固态薄膜最常以多晶形式出现,这意味着它们具有受约束的单晶晶粒。多晶膜可用于多种设备,例如磁存储介质,催化和热敏元件,保护涂层。因此,期望扩展到多晶膜,已经开发了在单晶金属基底上自组织形成纳米结构的方法。离子束溅射可用于在纳米级修饰表面,在大多数情况下,结果是在表面形成了波纹。可以通过改变影响纹波形成的宏观参数(例如离子束能量和离子束剂量)来实现具有明确定义的垂直粗糙度,受控的方向和周期性的基板。通过两种不同的沉积技术(热沉积和溅射沉积)将金薄膜(150 nm厚)沉积在玻璃显微镜载玻片上,从而产生不同的初始晶粒尺寸和晶粒尺寸分布。然后在不同的时间顺序对膜进行离子束溅射,以确定其形态演变,以及晶粒尺寸在离子束溅射薄膜的形态特征中所起的作用。然后通过FE SEM成像和AFM对所得的形态进行表征,给出有关粗糙度,波长和底层晶粒尺寸演变的数据。为了比较,实验中还包括了在云母上生长的商业获得的金膜,该金膜的晶粒尺寸为几百纳米。
课程简介: Thin solid films appear most commonly in polycrystalline form, which means that they have higly constrained single-crystalline grains. Polycrystalline films are used in a large variety of devices, such as magnetic storage media, catalytic and thermal elements, protective coatings. It is thus desirable to extend to polycrystalline films, the approaches which have been developed for the self-organised formation of nanostructures on single-crystalline metal substrates. Ion beam sputtering can be used to modify surfaces on a nanoscale level, in most cases the result is formation of ripples on the surface. Substrates with well-defined vertical roughness, controlled orientation and periodicity can be achieved by varying macroscopic parameters that influence ripple formation, such as ion beam energy and ion beam dose. Thin Au films (150 nm thick) were deposited on glass microscope slides by two different deposition techniques: thermal and sputter deposition, thus resulting in different initial grain sizes and grain size distributions. The films were then ion beam sputtered in a sequence of different times to determine the evolution of the morphology and the role grain size plays in the morphological characteristics of ion beam sputtered thin films. Resulting morphology was then characaterised by FE-SEM imaging and by AFM, giving data on roughness, wavelength and underlaying grain size evolution. For comparison, commercially obtained gold films grown on mica, which had grain sizes in the order of a few hundred nm, were also included in the experiment.
关 键 词: 纳米结构; 沉淀; 离子束
课程来源: 视频讲座网
最后编审: 2019-09-25:yuh
阅读次数: 34