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6.152j微/纳米加工技术（MIT）6.152J Micro/Nano Processing Technology (MIT) |
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| 课程网址: | http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc... |
| 主讲教师: | Martin Schmidt Susan Ruff ; Robert O’Handley |
| 开课单位: | 麻省理工学院 |
| 开课时间: | 2005-01-01 |
| 课程语种: | 英语 |
| 中文简介: |  |
| 课程简介: | This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology. |
| 关 键 词: | 微电子，微电子加工，集成电路，真空，化学气相沉积法; 离子注入; 软光刻; 互连金属化; 晶体生长河 |
| 课程来源: | 麻省理工学院公开课 |
| 最后编审: | 2020-10-11：yumf |
| 阅读次数: | 41 |