6.780 半导体制造][6.780 Semiconductor Manufacturing]

6.780 半导体制造 6.780 Semiconductor Manufacturing


课程网址:	http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc...
主讲教师:	Prof. Duane Boning
开课单位:	麻省理工学院
开课时间:	2003-01-01
课程语种:	英语
中文简介:	6.780涵盖了半导体制造工艺和工厂的统计建模和控制。主题包括：实验设计、响应面建模和工艺优化；缺陷和参数化产量建模；工艺/设备/电路产量优化；设备和工艺的监控、诊断和反馈控制；半导体制造操作的分析和调度。
课程简介:	6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
关键词:	半导体制造; 假设检验; 统计过程控制; 控制图设计
课程来源:	麻省理工学院公开课
最后编审:	2025-01-02：chenjy
阅读次数:	101

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