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6.780 半导体制造6.780 Semiconductor Manufacturing |
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| 课程网址: | http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc... |
| 主讲教师: | Prof. Duane Boning |
| 开课单位: | 麻省理工学院 |
| 开课时间: | 信息不详。欢迎您在右侧留言补充。 |
| 课程语种: | 英语 |
| 中文简介: |  |
| 课程简介: | 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations. |
| 关 键 词: | 半导体制造; 假设检验; 统计过程控制; 控制图设计; 实验设计; 良率模型 |
| 课程来源: | 麻省理工学院公开课 |
| 最后编审: | 2017-04-25：cmh |
| 阅读次数: | 51 |