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6.774物理加工：前期处理（麻省理工）6.774 Physics of Microfabrication: Front End Processing (MIT) |
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| 课程网址: | http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc... |
| 主讲教师: | Hoyt Judy; Reif L Rafael |
| 开课单位: | 麻省理工学院 |
| 开课时间: | 2004-01-01 |
| 课程语种: | 英语 |
| 中文简介: |  |
| 课程简介: | This course is offered to graduates and focuses on understanding the fundamental principles of the "front-end" processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion, ion implantation, and epitaxy. Other topics covered include: high performance MOS and bipolar devices including ultra-thin gate oxides, implant-damage enhanced diffusion, advanced metrology, and new materials such as Silicon Germanium (SiGe). |
| 关 键 词: | 物理模型; 物理加工; 工艺实践; 高性能MOS; 双极器件; 新材料; 先进的计量 |
| 课程来源: | 麻省理工学院公开课 |
| 最后编审: | 2020-10-01：yumf |
| 阅读次数: | 44 |