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自我催化MBE砷化镓纳米线的生长

Self-catalysed growth of GaAs nanowires by MBE
课程网址: http://videolectures.net/slonano07_rubini_sgg/  
主讲教师: Silvia Rubini
开课单位: 国家实验室
开课时间: 2008-01-18
课程语种: 英语
中文简介:
半导体纳米线(NWS)的生长通常由一种称为催化剂的金属粒子来辅助。由于在生长过程中催化剂在纳米线体中的扩散,用作不同于线的组分的材料的催化剂可能会改变半导体的性能。此外,最常用的催化剂是Au,一种与Si技术不相容的金属。因此,出于上述原因,开发一种无催化剂生长半导体纳米线的技术是非常重要的。本文报道了分子束外延无催化剂生长砷化镓纳米线的初步结果。在无催化剂预沉积的情况下,在硅片的切割边缘生长了GaAs-NWS。生长持续30分钟,在580 T 620°;C下进行。获得了两种纳米线。第一种类型的NWS长度为5μm,截面直径在数十nm范围内,在其端部有一个球形颗粒。能量色散X射线能谱(EDS)表明,球形粒子是由镓组成的,而nw体是镓。NWS密度取决于构成硅片切割边缘的面的晶体学方向。第二种类型的NWS通常具有较小的展弦比、明显的侧面和尖端表面,并且其尖端上没有金属颗粒。EDS曲线显示它们完全由砷化镓制成。EDS结果表明,Ga诱导的自催化生长发生在Ga液滴形成的特定表面位置,并在GaA沉积的第一阶段被捕获。研究正在进行中,以了解生长过程,尤其是了解无液滴NWS是通过不同的过程生长的,还是GA液滴的缺失是由于其在生长过程中丢失所致。
课程简介: Semiconductor nanowires (NWs) growth is typically assisted by a metal particle, called the catalyst. The use as the catalyst of a material different from the components of the wire may change the semiconductor properties due to the diffusion of the catalyst in the nanowire body during the growth. Moreover, the most commonly used catalyst is Au, a metal that is incompatible with the Si technology. For the above mentioned reasons it is therefore of importance to develop a technology leading to a catalyst-free growth of semiconductor nanowires. Here we report preliminary results on catalyst-free growth of GaAs NWs by molecular beam epitaxy. The GaAs NWs have been grown on cleaved edges of Si wafers, with no catalyst pre-deposition. The growth lasted 30 minutes and has been performed at 580 T 620 °C. Two kinds of nanowires have been obtained. The NWs of the first type are as long as 5 μm with a section diameter in the range of tens of nm and have a spherical particle at their end tip. Energy dispersive X-ray spectroscopy (EDS) demonstrates that the spherical particle is composed of Ga, and that the NW body is GaAs. The NWs density depends on the crystallographic orientation of the facets that compose the cleaved edges of the Si-wafers. The second type of NWs are generally characterised by a smaller aspect ratio, clearly faceted lateral and tip surfaces, and no metallic particle on their tip. EDS curves reveal that they are completely made of GaAs. The EDS results suggest that a Ga induced self-catalysed growth occurred on specific surface locations where Ga droplets formed and were trapped during the first stages of the GaAs deposition. Work is in progress to understand the growth process and in particular to understand whether the droplet-less NWs grow through a different process or the absence of a Ga droplet is due to its lost during growth.
关 键 词: 纳米技术; 分子纳米技术; 分子自组装
课程来源: 视频讲座网
最后编审: 2019-11-16:cwx
阅读次数: 73