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高性能N型碳纳米管场效应晶体管的研究进展

Developments of high performance n-type carbon nanotube field-effect transistors
课程网址: http://videolectures.net/kolokviji_liang_dhp/  
主讲教师: Xuelei Liang
开课单位: 北京大学
开课时间: 2008-12-03
课程语种: 汉简
中文简介:
随着摩尔定律的缩小,现代硅互补金属氧化物半导体(CMOS)技术面临巨大挑战,人们正在寻找替代品。碳纳米管(CNT)由于其新颖的结构和性质,被认为是未来集成电路最有前途的构件之一。自1998年第一个CNT场效应晶体管(CNTFET)设计以来,器件性能不断提高。通过使用钯(Pd)电极和highk材料(其不易于漏电流)作为栅极电介质,p型CNTFET现在已经超过了原始硅pMOSFET的能力。然而,n型CNTFET的发展滞后。这主要是由于难以在金属电极和CNT的导带之间制造肖特基无阻挡接触。生产nCNTFET的进展缓慢,严重阻碍了CNT集成电路的发展。我们最近发现钪(Sc)可以用于与CNT的导电带产生欧姆接触,并且可以容易地制造高性能n型CNTFET。基于这一发现,我们提出了一种基于CNT的无掺杂CMOS技术,并推动了n型CNTFET的极限。我们还通过将MultiWalled CNT与作为互连的单壁CNTFET集成在一起,展示了整个碳纳米管电路的设计。我们所有的结果都显示了基于CNT的集成电路的未来前景。
课程简介: As scaling down with Moore's law, the modern silicon complementary metal­oxide­semiconductor (CMOS) technology is facing great challenges and people are looking for alternatives. Carbon nanotube (CNT), due to its novel structure and properties, has been regarded as one of the most promising building blocks for the future integrated circuits. Since the first CNT field­effect transistor (CNTFET) was designed in 1998, device performance hasbeen continually improved. By using palladium (Pd) electrodes and high­k materials (which are less prone to current leakage) as gate dielectrics, p­type CNTFETs have now surpassed the capabilities of state­of­the­art silicon p­MOSFETs. However, the development of n­type CNTFETs has lagged behind. This is mainly due to the difficulty of fabricating a Schottky barrier­free contact between metal electrodes and the conduction band of the CNT. The slow progress in producing n­CNTFETs has greatly hindered the development of CNT­based integrated circuits. We Recently discovered that scandium (Sc) can be used to generate an ohmic contact with the conduction band of a CNT and high performance n­type CNTFETs can be easily fabricated. Based on this discovery, we proposed an CNT­based doping­free CMOS technology and pushed the limits of n­ type CNTFETs. We also demonstrated a design of whole carbon nanotube circuits by integrating Multi­Walled CNTs with the Single­Walled CNTFETs which serve as interconnects. All of our results show a prospective future of CNT­based integrated circuits. ----
关 键 词: 摩尔定律; 半导体; 碳纳米管
课程来源: 视频讲座网
最后编审: 2019-05-12:lxf
阅读次数: 46