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薄膜结构与等离子体表面工程

TankThin-film structures and plasma surface engineering
课程网址: http://videolectures.net/promogram_miran_mozetic_eng/  
主讲教师: Miran Mozetič
开课单位: 约瑟夫·斯特凡研究所
开课时间: 2013-08-14
课程语种: 英语
中文简介:
先进的薄膜结构、复合材料和等离子体处理表面是基于薄膜和表面科学的进展。为了了解等离子体自由基与聚合物和复合材料固体表面的相互作用,将通过光谱法和催化探针研究活性氧等离子体。氧等离子体将应用于先进的工艺处理,包括选择性等离子体蚀刻、放电清洗、冷灰化和等离子体灭菌。将研究新一代用于磨损保护和减摩的表面涂层(纳米复合材料、多层/超晶格、碳和含金属碳涂层)的物理和摩擦学性能。将测试此类涂层在干加工、硬加工和热加工以及复合材料加工工具保护中的应用。将通过质量和能量分辨光谱研究硬质涂层沉积过程中的等离子体过程。等离子体表面工程将取代传统的电化学沉积技术。等离子体气相沉积工艺也将用于固体氧化物燃料电池准晶薄膜和电解质薄膜的沉积。通过使用双离子束和/或样品旋转技术、低离子束能量和掠射离子入射角的高分辨率AES深度剖面,将实现表面、界面和深度剖面的精确表征。将采用AES、XPS、SPEM、SEM、TEM、XRD、EXAFS和AFM等相关方法研究等离子体处理表面和thi膜结构的成分、晶体结构和表面形貌。该计划的结果尤其适用于表面和等离子体科学、涂层技术和表面工程领域。
课程简介: Advanced thin-film structures, composite materials and plasma treated surfaces are based on progress in thin-films and surface science. Reactive oxygen plasmas will be studied by optical spectrometry and catalytic probes in order to understand interaction of plasma radicals with solid surfaces of polymers and composities. Oxygen plasmas wil be applied to advanced technological processing including selective plasma etching, discharge cleaning, cold ashing, and plasma sterilization. The physical and tribological properties of new generation of surface coatings (nanocomposite, multilayer / superlattice, carbon and metal containing carbon coatings)for wear protection and friction reduction will be studied. The application of such coatings for protection of tools for dry, hard and hot working machining as well as for machining of composites will be tested. The plasma processes during deposition of hard coatings will be studied by mass and energy-resolved spectroscopy. Plasma surface engineering will be applied to replace to conventional electrochemical deposition techniques which are ecological unacceptable. Plasma vapour deposition processes will be used also for deposition of quasicrystal thin films and electrolyte thin films for solid oxide fuel cells. The accurate characterization of surfaces, interfaces and depth profiles will be achieved by high resolution AES depth profilng using two ion beams and/or sample rotation technique, low ion beam energy and grazing ion incidence angle. The composition, crystalline structure and surface topography of plasma treated surfaces and thi-film structures will be investigated by relevant methods such as AES, XPS, SPEM, SEM, TEM, XRD, EXAFS and AFM. The results of the program are in particular foreseen to find their use in the fields of surface and plasma science, coatings technology and surface engineering.
关 键 词: 薄膜结构; 等离子体; 电化学沉积技术
课程来源: 视频讲座网
数据采集: 2021-11-27:zkj
最后编审: 2021-11-27:zkj
阅读次数: 56