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6.777j微机电装置设计和制造（麻省理工学院）6.777J Design and Fabrication of Microelectromechanical Devices (MIT) |
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| 课程网址: | http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc... |
| 主讲教师: | Carol Livermore ; Joel Voldman |
| 开课单位: | 麻省理工学院 |
| 开课时间: | 2015-04-16 |
| 课程语种: | 英语 |
| 中文简介: |  |
| 课程简介: | 6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points. |
| 关 键 词: | 微细加工技术; 材料特性; 流体流动; microscale运输; 放大器的反馈系统 |
| 课程来源: | 麻省理工学院公开课 |
| 最后编审: | 2015-12-09：linxl |
| 阅读次数: | 55 |