图 书 馆
亚微米和纳米技术6.781J / 2.391J Submicrometer and Nanometer Technology |
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| 课程网址: | http://ocw.mit.edu/courses/electrical-engineering-and-computer-sc... |
| 主讲教师: | Prof. George Barbastathis; Prof. Henry Smith; Prof. Karl Berggren |
| 开课单位: | 麻省理工学院 |
| 开课时间: | 2006-01-01 |
| 课程语种: | 英语 |
| 中文简介: |  |
| 课程简介: | This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.AcknowledgementsThe Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video. |
| 关 键 词: | 亚微米和纳米光学和电子显微镜; 表面特性; 制备和测量技术; 抵制技术; 光学投影; 干涉; X射线; 离子和电子光刻 |
| 课程来源: | 麻省理工大学公开课 |
| 最后编审: | 2024-05-11：chenjy |
| 阅读次数: | 45 |